Ball Miller/Mixer
Operating Procedure
Florod Laser Beam Writer
LBW manual LBW Example
Furnaces
Programmable Three zone tube furnace( up to 1100°C) from Lindberg/Blue
Two vacuum furnaces(up to 250-300°C) from VWR
Dry etching (Hummer)
TechPrep Polishing Machine
Phoenix Beta Grinder/polisher(equipped with METLAP Fluid Dispenser) from Buehler
RIE/PECVD
RTA Furnace
Westbond Wirebonder
Manual
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