Ball Miller/Mixer

Operating Procedure

Florod Laser Beam Writer

LBW manual
LBW Example

Furnaces

Programmable Three zone tube furnace( up to 1100°C) from Lindberg/Blue

Operating Procedure

Two vacuum furnaces(up to 250-300°C) from VWR

Dry etching (Hummer)

Dry etching (Hummer)

TechPrep Polishing Machine

Operating Procedure

Phoenix Beta Grinder/polisher(equipped with METLAP Fluid Dispenser) from Buehler

RIE/PECVD

RTA Furnace

Westbond Wirebonder

Manual